- Код статьи
- S3034621525090125-1
- DOI
- 10.7868/S3034621525090125
- Тип публикации
- Статья
- Статус публикации
- Опубликовано
- Авторы
- Том/ Выпуск
- Том 126 / Номер выпуска 9
- Страницы
- 1068-1074
- Аннотация
- Предложен и реализован новый подход к легированию оксида индия–галлия–цинка (IGZO) сурьмой. Материалы получены путем разложения нитратно-тартратного комплекса с использованием винной кислоты в качестве комплексообразователя. Фазовый состав и морфология легированных материалов исследованы методами рентгеновской дифрактометрии, сканирующей электронной микроскопии, энергодисперсионной рентгеновской спектроскопии и просвечивающей электронной микроскопии. Определены физические параметры легированных оксидов, такие как ширина запрещенной зоны (по данным УФ-спектрофотометрии) и удельное электрическое сопротивление.
- Ключевые слова
- оксид индия–галлия–цинка IGZO хелатирующий реагент винная кислота тартратно-нитратный метод
- Дата публикации
- 27.10.2025
- Год выхода
- 2025
- Всего подписок
- 0
- Всего просмотров
- 61
Библиография
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